Dye adsorption device and dye adsorption method

色素吸附装置以及色素吸附方法

Abstract

A dye adsorption device, wherein the dye adsorption time is significantly reduced compared to the prior art and productivity is improved, and the dye solution is used in an efficient manner at lower cost. This invention is provided with: a chamber (10) for housing the substrate (G) to be processed and forming a processing space (T); dye solution supply means (6, 7, 8) for supplying a dye solution (20) to the processing space; and decompression means (12, 13, 14) for performing decompression suction in the interior of the processing space. The decompression means dries the dye solution in the processing space under reduced pressure, causing the solvent in the dye solution to volatilize and the dye to be adsorbed by the semiconductor porous layer.
本发明提供色素吸附装置以及色素吸附方法。在色素吸附装置中,与以往相比能够大幅度缩短色素吸附时间从而提高生产量,且能够高效地使用色素溶液而减少成本。色素吸附装置具备:收纳被处理基板(G)并形成处理空间(T)的腔室(10)、向上述处理空间供给色素溶液(20)的色素溶液供给机构(6、7、8)、以及对上述处理空间内进行减压吸引的减压机构(12、13、14),利用上述减压机构使上述处理空间内的色素溶液被减压干燥,上述色素溶液的溶剂挥发从而使色素吸附于上述半导体多孔质层。

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